Thomas W. Kenny

Associate Professor
Faculty of Design Division, Department of Mechanical Engineering

Degrees

B.S. University of Minnesota - Physics (1983)

M.S. U.C. Berkeley - Physics (1987)

Ph.D. U.C. Berkeley

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- Physics (1989)

 

Research Interests

MicroElectroMechanical Systems and MicroMechanical Devices Tom's research group carries out research on microsensors based on silicon micromachining. This research has applications in inertial sensing, infrared imaging, and pressure sensing. We are also interested in the development of ultrasensitive cantilevers for detection of very small forces, and in studying the limits of mechanical force detection. Recent research efforts have included development of wafer-scale encapsulation of inertial sensors and resonators, microchannel cooling for integrated circuits, and mechanical force sensors for measurements of cell adhesion, insect locomotion, and the adhesion of geckos.

 

Awards/Honors

NSF CAREER Award (1995-1999)
Terman Fellowship (1995-1998)
Captain, Ultimate Frisbee Coed National Champions (RFBF), 1998
Captain, Ultimate Frisbee Coed World Champions (RFBF), 1999

 

Recent Publications

E.M. Chow, G. Yaralioglu, C.F. Quate, and T.W. Kenny, Characterization of a Two-Dimensional Cantilever Array with Through-Wafer Electrical Interconnects, Appl. Phys Lett. 80, 664 (2002).

L. Zhang, J.M. Koo, L. Jiang, K.E. Goodson, J.G. Santiago, and T.W. Kenny, Measurements and Modeling of Two-Phase Flow in Microchannels with Nearly-Constant Heat Flux Boundary Conditions, JMEMS 11,12 (2002).

Y. Hishinuma, T.H. Geballe , B.Y. Moyzhes, , and T.W Kenny, Refrigeration by Combined Tunneling and Thermionic Emission in Vacuum: Use of Nanometer Scale Design", Appl. Phys. Lett. 78, 2572 (2001).

J.I. Molho, A.E. Herr, B.P. Mosier, J.G. Santiago, T.W. Kenny, R.A Brennen, G.B. Gordon, B. Mohammadi, Optimization of Turn Geometries for On-Chip Electrophoresis, Analytical Chemistry 73, 1350 (2001).

K. Autumn, Y. Liang, W.P. Chan, T. Hsieh, R. Fearing, T.W. Kenny, and R. Full, Dry Adhesive Force of a Single Gecko Foot-Hair, Nature. 405: 681-685 (2000). T.W. Kenny, Nanometer-Scale Force Sensing with MEMS Devices, IEEE Sensors 1,148 (2001).

 

Projects

Microfabricated Sensors for Force Sensing in Biology (NSF)
Ultra-Sensitive Cantilevers for Magnetic Resonance Force Microscopy (DARPA/IBM)
Encapsulated High-Q resonators (SPAWAR/DARPA)
Wafer-Scale Packaging for Inertial Sensors (Bosch)

Last updated 10/16/02

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