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Tom Kenny elected Fellow of ASME

Faculty member recognized for significant research contributions in MicroElectroMechanical Devices and Systems.

Tom is widely recognized for significant research contributions in MicroElectroMechanical Devices and Systems. Tom's research leverages analytical and experimental studies of silicon MEMS devices, with fundamental results related to atto-newton forces, the van der Waals adhesion of geckos, and the observation of fatigue-free behavior in smoothed crystalline beams. Applied results include development of liquid cooling systems, and MEMS-based resonators for electronics timing. Recent work has focused on the development of wafer-scale MEMS encapsulation processes that enable enhanced device performance as well as manufacturability at low cost.

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