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Thomas Kenny

Thomas Kenny

Professor
Richard W. Weiland Professor and Senior Associate Dean for Student Affairs in the School of Engineering
PhD, UC Berkeley, Physics (1989)

Contact

Phone: 
(650) 725-9210

Kenny's group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Using these techniques, the group builds sensitive accelerometers, infrared detectors, and force-sensing cantilevers. This research has many applications, including integrated packaging, inertial navigation, fundamental force measurements, experiments on bio-molecules, device cooling, bio-analytical instruments, and small robots. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry.